| 发明名称 |
DEPOSITION FILM FORMING APPARATUS INCLUDING ROTARY MEMBER |
| 摘要 |
Disclosed is a deposition film forming apparatus including a plurality of rotary members. The deposition film forming apparatus includes a plurality of rotary members arranged on each substrate support in which the plurality of rotary members are configured to rotate a plurality of substrates, respectively. Each of the rotary members is rotated on the substrate support by a gas-foil method, and a cover is provided on a portion on the substrate support, other than portions where the plurality of rotary members are positioned. A gap is formed between the substrate supports and the cover to allow a predetermined gas used in the gas foil method to be discharged therethrough. |
| 申请公布号 |
US2016053368(A1) |
申请公布日期 |
2016.02.25 |
| 申请号 |
US201514635161 |
申请日期 |
2015.03.02 |
| 申请人 |
TGO Tech. Corporation |
发明人 |
LEE Yoojin;LEE Jaehak |
| 分类号 |
C23C14/50;C30B35/00;C30B25/12;C23C16/458;C30B23/02 |
主分类号 |
C23C14/50 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A deposition film forming apparatus, the apparatus comprising:
a plurality of substrate supports, wherein a plurality of rotary members are arranged on each of the substrate supports, the plurality of rotary members being configured to rotate a plurality of substrates, respectively, each of the rotary members is rotated on the substrate support by means of a gas-foil method, a cover is provided on a portion on the substrate support, except where the plurality of rotary members are positioned, and a gap is formed between the substrate supports and the cover to allow a predetermined gas used in the gas-foil method to be discharged therethrough. |
| 地址 |
Hwaseong-si KR |
