发明名称 |
STRIPPER COMPOSITION FOR REMOVING PHOTORESIST AND METHOD FOR PEELING OFF PHOTORESIST EMPLOYING SAME. |
摘要 |
The present invention relates to a stripper composition for removing photoresist and a method for peeling off photoresist employing the same, the stripper composition comprising: a chain amine compound having a weight average molecular weight of 95 g/mol or more; a chain amine compound having a weight average molecular weight of 90 g/mol or less; a cyclic amine compound; an amide-based compound in which a straight-chain or branched chain alkyl group having 1 to 5 carbon atoms is mono- or di-substituted by nitrogen; and a polar organic solvent, wherein the weight ratio between the chain amine compound having a weight average molecular weight of 95 g/mol or more and the chain amine compound having a weight average molecular weight of 90 g/mol or less is 1:1 to 1:10. |
申请公布号 |
WO2016028057(A1) |
申请公布日期 |
2016.02.25 |
申请号 |
WO2015KR08608 |
申请日期 |
2015.08.18 |
申请人 |
LG CHEM, LTD. |
发明人 |
PARK, TAE MOON;JUNG, DAE CHUL;LEE, DONG HOON;LEE, WOO RAM;LEE, HYUN JUN;KIM, JU YOUNG |
分类号 |
G03F7/42 |
主分类号 |
G03F7/42 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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