发明名称 基板検査装置
摘要 <P>PROBLEM TO BE SOLVED: To provide a substrate checkup device that can take into account, in determining the sequence of electrical characteristics tests on a plurality of wiring patterns, the static capacities of contact pins and the like coming into contact with the wiring patterns when a potential difference is given to and removed from each wiring pattern, and moreover can increase the checkup velocity without sacrificing the reliability of checkup results. <P>SOLUTION: In a substrate checkup device 1, some electrical characteristics tests the potential difference value assigned to each of which is below a prescribed reference level, out of a plurality of electrical characteristics tests, are set to a noted wiring pattern in the descending order of the number of contact pins in contact with some wiring patterns out of a plurality of wiring patterns, and other electrical characteristics tests the potential difference value assigned to each of which is at or above the prescribed reference level, out of the plurality of electrical characteristics tests, are set to the noted wiring pattern in the ascending order of the number of contact pins in contact with some wiring patterns out of the plurality of wiring patterns. <P>COPYRIGHT: (C)2013,JPO&INPIT
申请公布号 JP5866943(B2) 申请公布日期 2016.02.24
申请号 JP20110221571 申请日期 2011.10.06
申请人 日本電産リード株式会社 发明人 山下 宗寛
分类号 G01R31/02;H05K3/00 主分类号 G01R31/02
代理机构 代理人
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