发明名称 Semiconductor device and manufacturing method thereof
摘要 A method of manufacturing a semiconductor device includes providing a carrier including a first layer, a second layer, a first surface of the first layer and a second surface of the second layer, disposing a plurality of solder bumps on the second surface, disposing a molding between the plurality of solder bumps and over the second surface, cutting the first layer to form a first recess in the first layer, wherein the first recess is above a position between at least two of the plurality of solder bumps, and cutting the molding from a bottom surface of the first recess to form a second recess in the molding between the at least two of the plurality of solder bumps. Further, a semiconductor device includes a carrier including a first layer and a second layer, a plurality of solder bumps disposed on the second layer, a molding disposed over the second layer and surrounding the plurality of solder bumps, the molding includes a protruded portion protruding from a sidewall of the first layer adjacent to an end portion of the first layer.
申请公布号 US9269675(B2) 申请公布日期 2016.02.23
申请号 US201314057422 申请日期 2013.10.18
申请人 TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD. 发明人 Chen Ying-Ju;Chen Hsien-Wei
分类号 H01L21/46;H01L23/00;H01L21/78;H01L23/31;H01L21/56 主分类号 H01L21/46
代理机构 WPAT, P.C. 代理人 WPAT, P.C. ;King Anthony
主权项 1. A method of manufacturing a semiconductor device, comprising: providing a carrier including a substrate layer, a second layer, a first surface of the substrate layer and a second surface of the second layer; disposing a plurality of solder bumps on the second surface; disposing a molding on the second surface and between the plurality of solder bumps; cutting the substrate layer from the first surface to form a first recess in the substrate layer, wherein the first recess is above a position between at least two of the plurality of solder bumps; and cutting the molding from a bottom surface of the first recess to form a second recess in the molding between the at least two of the plurality of solder bumps.
地址 Hsinchu TW