发明名称 |
Semiconductor device and manufacturing method thereof |
摘要 |
A method of manufacturing a semiconductor device includes providing a carrier including a first layer, a second layer, a first surface of the first layer and a second surface of the second layer, disposing a plurality of solder bumps on the second surface, disposing a molding between the plurality of solder bumps and over the second surface, cutting the first layer to form a first recess in the first layer, wherein the first recess is above a position between at least two of the plurality of solder bumps, and cutting the molding from a bottom surface of the first recess to form a second recess in the molding between the at least two of the plurality of solder bumps. Further, a semiconductor device includes a carrier including a first layer and a second layer, a plurality of solder bumps disposed on the second layer, a molding disposed over the second layer and surrounding the plurality of solder bumps, the molding includes a protruded portion protruding from a sidewall of the first layer adjacent to an end portion of the first layer. |
申请公布号 |
US9269675(B2) |
申请公布日期 |
2016.02.23 |
申请号 |
US201314057422 |
申请日期 |
2013.10.18 |
申请人 |
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD. |
发明人 |
Chen Ying-Ju;Chen Hsien-Wei |
分类号 |
H01L21/46;H01L23/00;H01L21/78;H01L23/31;H01L21/56 |
主分类号 |
H01L21/46 |
代理机构 |
WPAT, P.C. |
代理人 |
WPAT, P.C. ;King Anthony |
主权项 |
1. A method of manufacturing a semiconductor device, comprising:
providing a carrier including a substrate layer, a second layer, a first surface of the substrate layer and a second surface of the second layer; disposing a plurality of solder bumps on the second surface; disposing a molding on the second surface and between the plurality of solder bumps; cutting the substrate layer from the first surface to form a first recess in the substrate layer, wherein the first recess is above a position between at least two of the plurality of solder bumps; and cutting the molding from a bottom surface of the first recess to form a second recess in the molding between the at least two of the plurality of solder bumps. |
地址 |
Hsinchu TW |