发明名称 |
PROCESS AND APPARATUS FOR PREPARATION OF OCTACHLOROTRISILANE |
摘要 |
The invention relates to a process and an apparatus for controlled preparation of octachlorotrisilane from monomeric chlorosilanes, by subjecting the chlorosilanes to a thermal plasma. |
申请公布号 |
US2016046494(A1) |
申请公布日期 |
2016.02.18 |
申请号 |
US201414782545 |
申请日期 |
2014.03.04 |
申请人 |
LANG Jürgen Erwin;RAULEDER Hartwig;MÜH Ekkehard;MOUSSALLEM Imad |
发明人 |
LANG Juergen Erwin;RAULEDER Hartwig;MUEH Ekkehard;MOUSSALLEM Imad |
分类号 |
C01B33/107;B01J19/08;C01B33/03 |
主分类号 |
C01B33/107 |
代理机构 |
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代理人 |
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主权项 |
1. A process for preparing octachlorotrisilane by subjecting chlorosilanes comprising at least one monomeric chlorosilane of the general formula I:
HxSiCl4-x (I), where x is independently selected from 0, 1, 2 and 3 to a thermal plasma. |
地址 |
US |