COMPACT CONFIGURABLE MODULAR RADIO FREQUENCY MATCHING NETWORK ASSEMBLY FOR PLASMA PROCESSING SYSTEMS

摘要

A compact configurable radio frequency (RF) matching network for matching RF energy output from an RF generator to a variable impedance load is disclosed. The matching network includes an input connector; an output connector; and a component assembly array including one or more tune and load electrical components. At least one of the electrical components is coupled to the input connector, at least one of the electrical components is coupled to the output connector, the component assembly array is adapted to be arranged in a selected topology, and the selected topology is adapted to reduce RF energy reflected from the variable impedance load. Numerous other aspects are provided.

主权项

1. A radio frequency (RF) matching network assembly for matching RF energy output from an RF generator to a plasma chamber with a variable impedance load, the RF matching network assembly comprising:
an input connector; an output connector; and a compact configurable component assembly array including one or more tune and load electrical components, wherein at least one of the electrical components is coupled to the input connector, at least one of the electrical components is coupled to the output connector, the component assembly array is adapted to be arranged in a plurality of network topologies using a fixed number of buses and configurable connectors, the network topologies including a selected network topology, and the selected network topology is adapted to reduce RF energy reflected from the variable impedance load.