发明名称 強誘電体膜の製造方法及び強誘電体膜の製造装置
摘要 A method of manufacturing a metal oxide film is disclosed. The method includes the steps of soaking a substrate on which the metal oxide film is formed in a precursor solution for forming the metal oxide film; and irradiating and scanning a light, the light being collected at an interface between the substrate and the precursor solution, wherein the light is transmitted through the precursor solution, and the metal oxide film is formed on the substrate.
申请公布号 JP5865601(B2) 申请公布日期 2016.02.17
申请号 JP20110101527 申请日期 2011.04.28
申请人 株式会社リコー;国立大学法人東北大学 发明人 渡辺 明;太田 英一;下福 光
分类号 H01L21/316;C01B13/32;C01G25/00;H01L21/8246;H01L27/105;H01L41/314 主分类号 H01L21/316
代理机构 代理人
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