发明名称 SCRIBING METHOD AND SCRIBING APPARATUS
摘要 The present invention provides a scribing method and a scribing apparatus. The scribing method can form a crack having an enough depth on a substrate when a scribe line is formed directly above and below a sealing material. When forming a scribe line on a mother substrate (G) comprising two glass substrates (G1, G2) glued together by a sealing material (SL), the scribing apparatus moves a scribing wheel (301) along the sealing material (SL) while pressing the scribing wheel (301) at a location facing the sealing material (SL) on a surface of the glass substrate (G1). In parallel with this, the scribing apparatus moves a scribing wheel (401) along the sealing material (SL) while pressing the scribing wheel (401) at a location displaced at a distance (W1) in a direction along the sealing material (SL) at the scribing wheel (301) of the surface of the glass substrate (G2).
申请公布号 KR20160018329(A) 申请公布日期 2016.02.17
申请号 KR20150042922 申请日期 2015.03.27
申请人 MITSUBOSHI DIAMOND INDUSTRIAL CO., LTD. 发明人 EJIMATANI AKIRA;TAKAMATSU KIYOSHI;MORI AKIRA
分类号 G02F1/1333;G02F1/13;H01L21/76 主分类号 G02F1/1333
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