| 摘要 |
The invention aims to provide a hot-air circulation heating device which can carry out uniform heat treatment in the surface of a substrate-shaped article to be heated. The hot-air circulation heating device provided includes a casing accommodating the article to be heated, an air circulation mechanism generating air circulating in the casing and switching the direction of the air circulation, a heating mechanism heating the air in the casing, and four first air valves arranged in the four directions by enclosing the periphery of the article to be heated accommodated in the casing and switching the directions of the circulation of the air in the casing through the cooperation with the air circulation mechanism, namely, successively switching the direction of conveying the air to the article to be heated and the direction of adsorbing the air by the article to be heated in the four directions. |
