发明名称 Zinc oxide anti-reflection layer having a syringe-like structure and method for fabricating the same
摘要 The disclosure provides a zinc oxide anti-reflection layer having a syringe-like structure and method for fabricating the same. The zinc oxide anti-reflection layer includes: a zinc oxide lower portion, wherein the zinc oxide lower portion has a nanorod array structure; and a zinc oxide upper portion connected to the zinc oxide lower portion, wherein the zinc oxide anti-reflection layer has a syringe-like structure.
申请公布号 US9261627(B2) 申请公布日期 2016.02.16
申请号 US201213469037 申请日期 2012.05.10
申请人 Industrial Technology Research Institute 发明人 Huang Kun-Ping;He Jr-Hau;Yeh Li-Ko;Lai Kun-Yu
分类号 G02B1/11;B05D5/06;B32B3/30;C23C14/30;G02B1/118;C23C18/12 主分类号 G02B1/11
代理机构 代理人
主权项 1. A zinc oxide anti-reflection layer having a syringe-like structure, comprising: a plurality of zinc oxide lower portions, wherein the zinc oxide lower portions have a nanorod array structure, wherein adjacent zinc oxide lower portions are spaced apart from each other; and a plurality of zinc oxide upper portions, each connected to one of the plurality of zinc oxide lower portions to form a syringe-like structure; wherein each of the zinc oxide lower portions has a diameter gradually decreasing from bottom to top, and each of the zinc oxide upper portions has a diameter gradually decreasing from bottom to top, and wherein a step is formed between each zinc oxide upper portion and zinc oxide lower portion.
地址 Hsinchu TW