发明名称 |
Zinc oxide anti-reflection layer having a syringe-like structure and method for fabricating the same |
摘要 |
The disclosure provides a zinc oxide anti-reflection layer having a syringe-like structure and method for fabricating the same. The zinc oxide anti-reflection layer includes: a zinc oxide lower portion, wherein the zinc oxide lower portion has a nanorod array structure; and a zinc oxide upper portion connected to the zinc oxide lower portion, wherein the zinc oxide anti-reflection layer has a syringe-like structure. |
申请公布号 |
US9261627(B2) |
申请公布日期 |
2016.02.16 |
申请号 |
US201213469037 |
申请日期 |
2012.05.10 |
申请人 |
Industrial Technology Research Institute |
发明人 |
Huang Kun-Ping;He Jr-Hau;Yeh Li-Ko;Lai Kun-Yu |
分类号 |
G02B1/11;B05D5/06;B32B3/30;C23C14/30;G02B1/118;C23C18/12 |
主分类号 |
G02B1/11 |
代理机构 |
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代理人 |
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主权项 |
1. A zinc oxide anti-reflection layer having a syringe-like structure, comprising:
a plurality of zinc oxide lower portions, wherein the zinc oxide lower portions have a nanorod array structure, wherein adjacent zinc oxide lower portions are spaced apart from each other; and a plurality of zinc oxide upper portions, each connected to one of the plurality of zinc oxide lower portions to form a syringe-like structure; wherein each of the zinc oxide lower portions has a diameter gradually decreasing from bottom to top, and each of the zinc oxide upper portions has a diameter gradually decreasing from bottom to top, and wherein a step is formed between each zinc oxide upper portion and zinc oxide lower portion. |
地址 |
Hsinchu TW |