| 摘要 |
A scanning probe microscope includes a vibration unit (14) to vibrate the cantilever (12) on the basis of a vibration signal, a displacement detection unit to output a displacement signal indicating the displacement of the cantilever (12), a phase adjustment unit (30) to provide a phase offset to a phase difference between the vibration signal and the displacement signal, a phase signal generating unit to generate a phase signal including information regarding the phase difference between the vibration signal and the displacement signal and the phase offset, and a control unit (25) to control the distance between the probe (11) and the sample (19) on the basis of the phase signal. The phase adjustment unit (30) combines a first phase amount that cancels an initial phase difference exiting in a condition where the probe (11) and the sample (19) are out of contact, with a second phase amount equal to or more than (0 [rad]) and less than or equal to (À/2 [rad]), and then provides a combined amount to the phase difference as a phase offset. |
