| 发明名称 |
Methods and Systems for Managing Semiconductor Manufacturing Equipment |
| 摘要 |
Provided are methods and systems for managing semiconductor manufacturing equipment. A method may include preventive maintenance involving steps of disassembling, cleaning, and assembling parts of a chamber. The assembling of the parts may include checking whether the parts are correctly assembled, using reflectance and absorptivity of a high-frequency voltage applied to the parts. |
| 申请公布号 |
US2016035545(A1) |
申请公布日期 |
2016.02.04 |
| 申请号 |
US201514631083 |
申请日期 |
2015.02.25 |
| 申请人 |
Samsung Electronics Co., Ltd. |
发明人 |
Baek Kye Hyun;Kwon Ohyung;Cho Junghyun;Park Haejoong |
| 分类号 |
H01J37/32 |
主分类号 |
H01J37/32 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A method of managing semiconductor manufacturing equipment, comprising performing preventive maintenance on the semiconductor manufacturing equipment, the preventive maintenance comprising disassembling, cleaning, and assembling parts of a chamber, wherein the assembling of the parts comprises checking whether the parts are correctly assembled, using reflectance and absorptivity of a high-frequency voltage applied to the parts. |
| 地址 |
Suwon-si KR |
