发明名称 |
APPARATUS AND METHOD FOR HOLDING A SUBSTRATE DURING LAYER DEPOSITION IN A VACUUM CHAMBER |
摘要 |
The present disclosure provides a holding arrangement (100) for holding a substrate (10) during layer deposition in a vacuum chamber. The holding arrangement (100) includes a carrier (110) having a support surface (112) configured for supporting the substrate (10); and one or more holding devices (120) provided at the carrier (110). Each each holding device (120) includes at least one rotatable device (122) configured to rotate around a rotation axis (124), wherein the rotation axis (124) is substantially perpendicular to the support surface (112), and wherein the rotatable device (122) has a contact element (126, 526) positioned at a distance from the rotation axis (124) for holding the substrate (10) after rotation. |
申请公布号 |
WO2016015745(A1) |
申请公布日期 |
2016.02.04 |
申请号 |
WO2014EP66181 |
申请日期 |
2014.07.28 |
申请人 |
APPLIED MATERIALS, INC.;HINTERSCHUSTER, REINER;BRÜNING, ANDRE |
发明人 |
HINTERSCHUSTER, REINER;BRÜNING, ANDRE |
分类号 |
C23C16/458;B65G49/06;C23C14/50 |
主分类号 |
C23C16/458 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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