发明名称 半導体装置の作製方法
摘要 When a semiconductor device having a surface provided with a flexible protective material is manufactured, the misalignment of the protective material occurs at the time of disposing the protective material or performing adhesion treatment. In the case where the terminal portion over the substrate has a length X of 5 mm or less, by providing a step layer with a thickness of 0.38 X or more and 2 mm or less over the element portion, a space is formed between a surface of the terminal portion and the protective material even though the protective material disposed over the step layer so as to cover the element portion is overlapped with the terminal portion. By using an attaching member including an elastic material with a surface hardness of 50 or more and 100 or less in this state, the protective material and the substrate may be attached to each other.
申请公布号 JP5852810(B2) 申请公布日期 2016.02.03
申请号 JP20110180658 申请日期 2011.08.22
申请人 株式会社半導体エネルギー研究所 发明人 鶴目 卓也;千田 章裕
分类号 H01L21/56;H01L23/29;H01L23/31 主分类号 H01L21/56
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