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发明名称
ELECTOSTATIC CHUCK AND METHOD FOR REPARING THE SAME
摘要
척 플레이트와, 상기 척 플레이트의 외측에 배치되는 포커스 링을 포함하고, 상기 척 플레이트는 제1척 플레이트와, 상기 제1척 플레이트의 외측 둘레에 배치되며, 상기 제1척 플레이트에 본딩되는 제2척 플레이트를 포함하는 정전척을 개시한다.
申请公布号
KR101591455(B1)
申请公布日期
2016.02.03
申请号
KR20130162240
申请日期
2013.12.24
申请人
(주)엘케이솔루션
发明人
강창성;이준호;유재석
分类号
H01L21/683;H02N13/00
主分类号
H01L21/683
代理机构
代理人
主权项
地址
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