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发明名称
DEVICE AND METHOD FOR THE TREATMENT OF DISK-SHAPED SUBSTRATES
摘要
申请公布号
EP1464075(A2)
申请公布日期
2004.10.06
申请号
EP20020796697
申请日期
2002.12.20
申请人
MATTSON WET PRODUCTS GMBH
发明人
SPEH, ULRICH;NAEGELE, EBERHARD
分类号
B08B3/02;H01L21/00;(IPC1-7):H01L21/00
主分类号
B08B3/02
代理机构
代理人
主权项
地址
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