发明名称 |
SYSTEMS AND METHODS FOR AUTOMATICALLY VERIFYING CORRECT DIE REMOVAL FROM FILM FRAMES |
摘要 |
A skeleton wafer inspection system includes an expansion table displaceable relative to a camera configured for capturing segmental images of a skeleton wafer on a film frame. During segmental image capture, illumination is directed to the top and/or bottom of the film frame. Segmental images are digitally stitched together to pro duce a composite image, which can be processed to identify die presence or absence therein at active area die positions having counterpart die positions in a process wafer map. A composite image of a diced wafer on a film frame can also be generated, and used as a navigation aid or guide during die sort operations, or to verify whether a die sort apparatus has correctly detected a reference die prior to die sort operations. A composite image of a skeleton wafer can similarly be generated for use as a navigation aid or guide for film frame repopulation operations. |
申请公布号 |
SG11201510385Y(A) |
申请公布日期 |
2016.01.28 |
申请号 |
SG11201510385Y |
申请日期 |
2014.06.06 |
申请人 |
ASTI HOLDINGS LIMITED |
发明人 |
AMANULLAH, AJHARALI;LAI, TIM HING;LIN, JING;NG, LIAN SENG;TAN, SOON GUAN |
分类号 |
H01L21/66;H01L21/78 |
主分类号 |
H01L21/66 |
代理机构 |
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