发明名称 |
ARC EVAPORATED ME11-AME2AZI/MO1-B-CSICBBZII MULTILAYER COATINGS |
摘要 |
The present invention relates to a coating comprising a multilayer film, which is characterized by an multi-layered structure comprising layers of the type I and layers of the type II, wherein the layers of the type I consist of metal nitride with chemical composition given by the formula Me11-aMe2aZI and the layers of the type II consist of a Mo-comprising material with chemical composition given by the formula Mo1-b-cSicBbZII or Mo1-b-cSicBb. The present invention relates furthermore to a method for depositing the above mentioned coating. |
申请公布号 |
WO2016012600(A1) |
申请公布日期 |
2016.01.28 |
申请号 |
WO2015EP67023 |
申请日期 |
2015.07.24 |
申请人 |
OERLIKON SURFACE SOLUTIONS AG, TRÜBBACH |
发明人 |
RIEDL, HELMUT;ARNDT, MIRJAM;POLCIK, PETER;MAYRHOFER, PAUL HEINZ |
分类号 |
C23C28/00;C23C14/06;C23C28/04 |
主分类号 |
C23C28/00 |
代理机构 |
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地址 |
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