| 摘要 |
PROBLEM TO BE SOLVED: To provide a line-shape illumination device, manufacturing method of the line-shape illumination device and inspection method thereof that allow accuracy of a line-shape irradiation position to be secured.SOLUTION: A line-shape illumination device comprises: a plurality of blocks with a substrate 20 that is mounted in such a way that a plurality of light sources 1 is arranged linearly in an X-direction, respectively, and is attached to an illumination device body 10 in such a way that the plurality of light sources 1 is arranged linearly in the X-direction; an elongated-shape light converging lens 40 that is attached to the illumination device body 10 so as to extend in the X-direction, and converges light of the plurality of light sources 1 to a line shape; and adjustment means 50 that moves at least a part of the plurality of blocks with the substrate 20 in a Z-direction relative to the illumination device body 10 when regarding an optical axis direction of the plurality of light sources 1 as a Z-direction or moves a part in the X-direction of the light converging lens 40 in the Z-direction relative to the illumination device body 10 and thereby adjusts a distance in the Z-direction between at least a part of the plurality of light sources 1 and the light converging lens 40. |
