Pattern forming method and mask pattern data

摘要

According to one embodiment, a pattern forming method includes: forming a guide layer, including a base layer and a neutralization film with a plurality of parallel line sections, on a processing target film, forming a polymer material containing first polymer segments and second polymer segments, on the guide layer, forming a self-assembly pattern having a plurality of first polymer portions containing the first polymer segment and extending in a direction of the line sections, and a plurality of second polymer portions containing the second polymer segment alternating with the first polymer portions and extending along the direction of the line sections, and selectively removing the second polymer portions. The widths of line sections of both ends of the plurality of line sections of the neutralization film are about two times the width of each first polymer portion or each second polymer portion.

主权项

1. A pattern forming method, comprising:
forming a guide layer, including a base layer and a neutralization film with a plurality of parallel line sections, on a target film to form a mask substrate; applying a polymer material on the guide layer, the polymer material containing a first polymer segment and a second polymer segment; forming a self-assembly pattern from the polymer material, the self-assembly pattern having a plurality of first polymer portions containing the first polymer segment and extending in a direction of the line sections, and a plurality of second polymer portions containing the second polymer segment alternating with the first polymer portions and extending along the direction of the line sections, wherein the second polymer portions include one that is located at a first outer periphery of the pattern and another that is located at a second outer periphery of the pattern; and removing the second polymer portions, wherein the widths of line sections at ends of the plurality of line sections of the neutralization film are about two times the width of each first polymer portion or each second polymer portion in a direction perpendicular to the line sections, and the neutralization film is neutral with respect to the first polymer segment and the second polymer segment.