| 主权项 |
1. An article storage facility comprising:
a storage rack configured to store a semiconductor wafer and a reticle; a storage and retrieval transport apparatus; a first accommodation unit provided in the storage rack and configured to store a wafer container for containing the semiconductor wafer; a second accommodation unit provided in the storage rack and configured to store a reticle container for containing the reticle, a wall-like structure forming an arrangement space therein where the storage and retrieval transport apparatus, the first accommodation unit, and the second accommodation unit are arranged; a first transport apparatus provided so as to correspond to a first opening formed in the wall-like structure and configured to transport, between inside and outside of the arrangement space via the first opening, the wafer container transported between the storage and retrieval transport apparatus and an external transport apparatus outside the arrangement space; and a second transport apparatus provided so as to correspond to a second opening formed in the wall-like structure separately from the first opening, the second opening being formed with an opening direction different from an opening direction of the first opening, and configured to transport, between inside and outside of the arrangement space via the second opening, the reticle container transported between the storage and retrieval transport apparatus and an external transport apparatus outside the arrangement space; wherein the storage and retrieval transport apparatus includes a holding unit configured to hold a top flange formed at an upper portion of the wafer container to support the wafer container in a hanging state; and a flange portion configured to allow the storage and retrieval transport apparatus to hold the reticle container using the holding unit to support the reticle container in a hanging state is formed at an upper portion of the reticle container, the storage and retrieval transport apparatus transports the wafer container between the first transport apparatus and the first accommodation unit, and the reticle container between the second transport apparatus and the second accommodation unit. |
