Transmission electron diffraction measurement apparatus and method for measuring transmission electron diffraction pattern

摘要

Provided is a transmission electron diffraction measurement apparatus including an electron gun; a first optical system under the electron gun; a sample chamber under the first optical system; a second optical system under the sample chamber; an observation chamber under the second optical system; a region that emits light by receiving energy from an electron in the observation chamber; and a camera facing the region.

主权项

1. A method for measuring a transmission electron diffraction pattern comprising the steps of:
irradiating an oxide semiconductor film with an electron emitted from an electron gun; and taking a moving image of a pattern appearing on a fluorescent plate by irradiating the oxide semiconductor film with the electron, wherein the oxide semiconductor film includes indium, gallium, and zinc.