发明名称 LASER PROCESSING APPARATUS
摘要 Disclosed is a laser processing apparatus. The laser processing apparatus of the present invention, comprises: a laser generation unit which generates a microwave laser having a characteristic of a chirped laser by oscillating simultaneously a plurality of wavelengths; a laser amplification unit which amplifies the laser generated from the laser generation unit; a chromatic dispersion control unit which controls a pulse width and a chirp of laser outputted from the laser amplification unit; and an optical integration unit which irradiates to a workpiece by adjusting a depth of focus of the laser of which the chirp and the pulse width are controlled by a chromatic dispersion control unit.
申请公布号 KR20160009092(A) 申请公布日期 2016.01.25
申请号 KR20160002329 申请日期 2016.01.08
申请人 MICROINSPECTION, INC. 发明人 EUN, TAK;BYUN, CHEOL WOONG;PARK, YOUNG MIN
分类号 B23K26/062;B23K26/06;B23K26/0622;B23K26/064 主分类号 B23K26/062
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