CAPACITIVE SENSOR, ACOUSTIC SENSOR AND MICROPHONE

摘要

A diaphragm is arranged on the upper surface of a silicon substrate so as to cover a chamber in the silicon substrate. Multiple anchors are provided on the upper surface of the silicon substrate, and the lower surfaces of corner portions of the diaphragm are supported by the anchors. Also, a fixed electrode plate is provided above the diaphragm with an air gap therebetween. In a view from a direction perpendicular to the upper surface of the silicon substrate, the entire length of the outer edge of the diaphragm located between adjacent anchors is located outward of a line segment that circumscribes the edges of the adjacent anchors on the side distant from the center of the diaphragm. Also, one or two or more through-holes are formed in the diaphragm in the vicinity of the anchors.

主权项

1. A capacitive sensor comprising:
a substrate having a cavity that is open at least at an upper surface; a vibrating electrode plate formed above the substrate so as to cover an upper portion of the cavity; a plurality of anchors that are arranged with a gap in an outer peripheral portion of the vibrating electrode plate and enable the vibrating electrode plate to be fixed to a stationary member; and a fixed electrode plate arranged so as to oppose the vibrating electrode plate, wherein in a view from a direction perpendicular to an upper surface of the substrate, an entire length of an outer edge of the vibrating electrode plate located between adjacent anchors is located outward of a tangent that circumscribes edges of the adjacent anchors on a side distant from a center of the vibrating electrode plate, and one or two or more openings are provided in regions of the vibrating electrode plate that are in a vicinity of the anchors.