| 摘要 |
PROBLEM TO BE SOLVED: To provide an electrostatic chuck device capable of improving voltage resistance by preventing insulation destruction between an electrostatic chuck part and a base part for temperature adjustment, improving uniformity in the in-plane temperature of a plate-like sample placement surface in the electrostatic chuck part, and improving voltage resistance of a heating member provided in the electrostatic chuck part.SOLUTION: An electrostatic chuck device 1 comprises: an electrostatic chuck part 2 of which the surface is used as a placement surface for placing a plate-like sample W thereon and which incorporates an internal electrode 13 for electrostatic adsorption; and a base part 3 for temperature adjustment which adjusts the electrostatic chuck part 2 to a desired temperature. A heater element 5 is adhered through a sheet-like adhesion material 4 to a bottom face of the electrostatic chuck part 2, the electrostatic chuck part 2 to which the heater element 5 is adhered and the base part 3 for temperature adjustment are adhered and integrated through an organic adhesive layer 8 and a sheet-like insulation member 7, and the heater element 5 is formed from mutually independent two or more heater patterns. |
