Valve, fluid control device

摘要

In a fluid control device, a check valve includes a first valve housing and a first diaphragm. The first diaphragm defines a first valve chamber and a second valve chamber. An exhaust valve includes a second valve housing and a second diaphragm. The second diaphragm defines a third valve chamber and a fourth valve chamber. The check valve is opened and closed by a difference in pressure between the first valve chamber and the second valve chamber. The exhaust valve is opened and closed by a difference in pressure between the third valve chamber and the fourth valve chamber.

主权项

1. A valve comprising:
a valve housing; and a diaphragm that divides an inside of the valve housing and defines a first region and a second region in the valve housing; wherein the valve housing includes:
a first ventilation hole to communicate with the first region;a second ventilation hole to communicate with the second region; anda third ventilation hole to communicate with a region outside of the valve housing; the diaphragm includes:
a fourth ventilation hole to communicate with both the second ventilation hole and the second region;a first face that communicates with the first region; anda second face that communicates with the third ventilation hole; and the diaphragm is fixed to the valve housing so that, in a case in which a pressure of the first region is higher than a pressure of the second region, the diaphragm makes the first ventilation hole and the second ventilation hole communicate with each other and blocks communication between the third ventilation hole and the fourth ventilation hole; and, in a case in which the pressure of the first region is lower than the pressure of the second region, the diaphragm makes the third ventilation hole and the fourth ventilation hole communicate with each other and blocks the communication between the first ventilation hole and the second ventilation hole.