发明名称 |
SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD OF THE SAME |
摘要 |
PROBLEM TO BE SOLVED: To proximally position a transistor and a protection diode of the transistor while inhibiting leakage current from the transistor to the protection diode.SOLUTION: A semiconductor device manufacturing method comprises the steps of: forming an element isolation insulation film 2 on a silicon substrate 1 to partition the silicon substrate 1 into a plurality of element formation regions 3 and forming a transistor T1 and a protection diode 20; and forming a gate insulation film 14 in the region 12 where the protection diode 20 is to be formed on the transistor T1 side beyond the protection diode 20 side and forming a protection electrode 16 on the gate insulation film 14. A width of each of the gate insulation film 14 and the protection electrode 16 is made larger than a gate length. The protection electrode 16 is connected to potential where a channel of a gate electrode 15 is turned off, or the same potential with the gate electrode 15. |
申请公布号 |
JP2016009825(A) |
申请公布日期 |
2016.01.18 |
申请号 |
JP20140131249 |
申请日期 |
2014.06.26 |
申请人 |
FUJITSU SEMICONDUCTOR LTD |
发明人 |
KUMENO KAZUYUKI |
分类号 |
H01L27/06;H01L21/822;H01L27/04;H01L29/861;H01L29/868 |
主分类号 |
H01L27/06 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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