发明名称 SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD OF THE SAME
摘要 PROBLEM TO BE SOLVED: To proximally position a transistor and a protection diode of the transistor while inhibiting leakage current from the transistor to the protection diode.SOLUTION: A semiconductor device manufacturing method comprises the steps of: forming an element isolation insulation film 2 on a silicon substrate 1 to partition the silicon substrate 1 into a plurality of element formation regions 3 and forming a transistor T1 and a protection diode 20; and forming a gate insulation film 14 in the region 12 where the protection diode 20 is to be formed on the transistor T1 side beyond the protection diode 20 side and forming a protection electrode 16 on the gate insulation film 14. A width of each of the gate insulation film 14 and the protection electrode 16 is made larger than a gate length. The protection electrode 16 is connected to potential where a channel of a gate electrode 15 is turned off, or the same potential with the gate electrode 15.
申请公布号 JP2016009825(A) 申请公布日期 2016.01.18
申请号 JP20140131249 申请日期 2014.06.26
申请人 FUJITSU SEMICONDUCTOR LTD 发明人 KUMENO KAZUYUKI
分类号 H01L27/06;H01L21/822;H01L27/04;H01L29/861;H01L29/868 主分类号 H01L27/06
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