| 摘要 |
The objective of the present invention is to prevent grinding swarf from being attached to a lower plane of a plate-shaped work, when the plate-shaped work is carried out from a chuck table. A method for carrying out the plate-shaped work of the present invention prevents the plate-shaped work (W) from being dented and broken due to that an outer circumference part (Wc) of the plate-shaped work (W) is attached to a suction area (3) like a sucking disc, and prevents the grinding swarf from being attached to the lower plane (Wb) of the plate-shaped work (W) when the plate-shaped work (W) is carried out from the chuck table (1), by performing: an outer circumference floating process of floating only the outer circumference part of the plate-shaped work (W) from the suction area (3) by spouting cleansing water (14) from the outer circumference part of the suction area (3) by supplying the cleansing water (14) to a cleansing water supply line (13) as maintaining the plate-shaped work (W) in the suction area (3) through suction by connecting a porous plate (2) and a suction source (7) by a suction line (6); a plate-shaped work retaining process of retaining the plate-shaped work (W) by a carrying out unit (20); and a carrying out process of carrying out the plate-shaped work (W) from the chuck table (1) by separating the whole plate-shaped work from the chuck table (1). |
