| 摘要 |
An apparatus for degassing gases having large gas molecules, such as argon, from liquids for use in semiconductor processing is provided. The apparatus includes a spool-free tubing in a cylindrical vessel with a removable lid and a crystalline window. The apparatus is assembled by removing the lid, connecting the tubing to an inlet and an outlet of the lid through connectors, arranging the tubing in the vessel with the lid, and fixing the lid. |
