| 摘要 |
PROBLEM TO BE SOLVED: To provide an eddy current type displacement sensor having redundancy and excellent in detection accuracy.SOLUTION: An eddy current type displacement sensor 1 comprises: an oscillation circuit 15 for oscillating an oscillation coil 12; an oscillation circuit 25 for oscillating an oscillation coil 22; a metal plate 30 in which an eddy current is generated by the oscillation of the oscillation coils 12, 22 and which is displaced relative to the oscillation coils 12, 22; a detection unit 16 for detecting the position of the metal plate 30 through the detection of an induction voltage generated in a reception coil 13 on the basis of the eddy current generated in the metal plate 30; and a detection unit 26 for detecting the position of the metal plate 30 through the detection of an induction voltage generated in a reception coil 23 on the basis of the eddy current generated in the metal plate 30. The oscillation circuit 15 does not oscillate the oscillation coil 12 when the oscillation coil 22 is oscillating, and the oscillation circuit 25 does not oscillate the oscillation coil 22 when the oscillation coil 12 is oscillating. |
