APPARATUS AND METHOD FOR SELF-REGULATING FLUID CHEMICAL DELIVERY

摘要

Methods and apparatus for chemical delivery are provided herein. In some embodiments, a first reservoir holds a first volume of fluid, receives a carrier gas, and outputs the carrier gas together with vapor derived from the first volume of fluid. A second reservoir holds a second volume of fluid and is capable of delivering a part of the second volume of fluid to the first reservoir. A self-regulating tube extends from the first reservoir to a region above the second volume of fluid in the second reservoir.

主权项

1. A chemical delivery apparatus, comprising:
a body having a first reservoir that defines a first volume, the first reservoir including a carrier gas inlet and a carrier gas outlet; a second reservoir disposed in the body above the first reservoir and defining a second volume, the second reservoir having a fill tube fluidly coupling the second reservoir to the first reservoir; and a self-regulating tube extending from the second reservoir to the first reservoir.