MICROMACHINING METHOD AND SYSTEM FOR PATTERNING A MATERIAL, AND METHOD FOR USING ONE SUCH MICROMACHINING SYSTEM

摘要

The present invention relates to a micromachining method for patterning a material. The pattern is made up of a plurality of points. Said method includes the following steps: - emitting a spatially and temporally coherent pulsed light beam; - dynamically shaping said spatially and temporally coherent pulsed light beam in a modulation plane of a dynamic optical modulation device by applying at least one phase modulation so as to shape said light beam in accordance with the plurality of points forming the pattern; and - focusing the thus-shaped light beam, by means of a focusing device, on one surface of said material placed within a working plane in a Fourier configuration relative to the modulation plane. In said method, patterning the material is carried out with a pulse train containing a finite number of pulses of said light beam that is strictly less than the number of points forming the pattern, and emission of the light beam is controlled so that each pulse has a predetermined pulse duration between 10 ps and 100 ns. The invention also relates to a micromachining system for implementing said method and to a method for using said system.