METHOD AND APPARATUS FOR TRANSPORTING BRITTLE MATERIAL SUBSTRATE

摘要

According to the present invention, the present invention adsorbs and transfers only one sheet of substrate from a substrate storage unit when the substrate is stacked to be stored and enables a nozzle to be disposed on a side of the substrate storage unit (15) where the substrates are stored to be adjacent and correspond to an ascending position of the substrate. According to the present invention, a compressed air flow is injected from the nozzle (23) when the substrate is transferred in order to enable the lower substrate to fall even is the overlapped substrate is transferred to enable only one sheet of upper substrate to be adsorbed and transferred.