Spectromètre a transformée de Fourier miniaturisé

摘要

The arrangement has interferometer arms, where optical modulation of radiation in one of the arm is produced by translational displacement of a micromechanical translation mirror (14a). The mirror is optically accessible on one side or on both sides. The modulation is produced with effective oscillation amplitude of 50 micro millimeters and a usable mirror surface area of 1 millimeter square.