Resonance enhanced absorptive color filters having resonance cavities

摘要

Resonance enhanced color filter arrays are provided for image sensors. Resonance cavities formed with color filter materials that enhance the color filtering capabilities of the color filter materials. Resonance enhanced color filter arrays may be provided for back side illumination image sensors and front side illumination image sensors. A layer of high refractive index material or metamaterial may be provided between a microlens and a color filter material to serve as a first partially reflecting interface for the resonance cavity. An optional layer of high refractive index material or metamaterial may be provided between color filter material and a substrate. In front side illumination image sensors, color filter material may be provided in a light guide structure that extends through interlayer dielectric. The color filter material in the light guide structure may form at least part of a resonance cavity for a resonance enhanced color filter array.

主权项

1. An image sensor, comprising;
an array of photodiodes in a substrate; color filter material in a color filter array; a microlens array; and a metamaterial layer between the color filter material and the microlens array, wherein a resonance cavity is formed at least partly from the color filter material and a first partially-reflecting interface between the color filter material and the metamaterial layer, and wherein the color filter array is formed between the microlens array and the substrate on a first side of the substrate, wherein the image sensor further includes an additional color filter array with an additional resonance cavity on a second side of the substrate.