发明名称 Methods Of Forming A Charge-Retaining Transistor
摘要 A charge-retaining transistor includes a control gate and an inter-gate dielectric alongside the control gate. A charge-storage node of the transistor includes first semiconductor material alongside the inter-gate dielectric. Islands of charge-trapping material are alongside the first semiconductor material. An oxidation-protective material is alongside the islands. Second semiconductor material is alongside the oxidation-protective material, and is of some different composition from that of the oxidation-protective material. Tunnel dielectric is alongside the charge-storage node. Channel material is alongside the tunnel dielectric. Additional embodiments, including methods, are disclosed.
申请公布号 US2015380432(A1) 申请公布日期 2015.12.31
申请号 US201514847436 申请日期 2015.09.08
申请人 Micron Technology, Inc. 发明人 Ramaswamy D.V. Nirmal
分类号 H01L27/115;H01L21/285;H01L29/423;H01L21/28 主分类号 H01L27/115
代理机构 代理人
主权项
地址 Boise ID US