Surface emitting laser element and atomic oscillator

摘要

A surface emitting laser element includes plural surface emitting lasers provided on a substrate. Each of the plural surface emitting lasers includes a first reflection mirror provided on the substrate; an active layer provided on the first reflection mirror; a wavelength adjustment region provided on the active layer; and a second reflection mirror provided on the wavelength adjustment region. The wavelength adjustment region includes a phase adjustment layer and a wavelength adjustment layer provided on the phase adjustment layer. A thickness of the wavelength adjustment region is approximately an odd multiple of a wavelength of emitted light divided by four. A thickness of the phase adjustment layer is approximately an even multiple of the wavelength of the emitted light divided by four. A thickness of the wavelength adjustment layer is different from a thickness of a wavelength adjustment layer of at least one of the other surface emitting lasers.

主权项

1. A surface emitting laser element including a plurality of surface emitting lasers provided on a substrate, each of the plurality of surface emitting lasers comprising:
a first reflection mirror provided on the substrate; an active layer provided on the first reflection mirror; a wavelength adjustment region provided on the active layer; and a second reflection mirror provided on the wavelength adjustment region, wherein the wavelength adjustment region includes a phase adjustment layer and a wavelength adjustment layer provided on the phase adjustment layer, an optical thickness of the wavelength adjustment region is approximately a positive odd multiple of a wavelength of emitted light divided by four, an optical thickness of the phase adjustment layer is approximately a positive even multiple of the wavelength of the emitted light divided by four, and an optical thickness of the wavelength adjustment layer is different from a thickness of a wavelength adjustment layer of at least one of the other surface emitting lasers.