Spatial light modulation elements, method for manufacturing same, and spatial light modulators and exposure apparatus comprising same

摘要

Provided is a spatial light modulation element comprising a substrate; a flat portion that is movable relative to the substrate; a flat board attached to the flat portion; and a dielectric film that is formed on a surface of the flat board opposite the surface on which the flat portion is attached, and reflects incident light. In the spatial light modulation element the dielectric film may include two or more types of dielectric layers that are repeatedly layered in an alternating manner, such that adjacent layers have different refractive indexes from each other. Furthermore, the dielectric film may be formed by alternately layering an Al2O3 film and a SiO2 film.

主权项

1. A spatial light modulation element comprising:
a substrate; a flat portion that is movable relative to the substrate and includes a lower non-conductive layer, an upper non-conductive layer and a flat structure layer provided between the lower non-conductive layer and the upper non-conductive layer; a flat board attached to the upper non-conductive layer of the flat portion; and a dielectric film that is formed on a surface of the flat board opposite the surface on which the flat portion is attached, and reflects incident light.