INTERFERENTIAL POSITION-MEASURING DEVICE AND METHOD FOR OPERATING INTERFERENTIAL POSITION-MEASURING DEVICE

摘要

PROBLEM TO BE SOLVED: To provide an interferential position-measuring device which secures high-accuracy position measurement.SOLUTION: A beam emitted from a light source 30 is split into at least two sub-beams, at least one of the sub-beams impinges on one or more optical functional elements 10 in an object. The sub-beams are subsequently superimposed at a superimposition location by interference, at least one resulting signal beam propagates toward an evaluation unit which is configured to generate at least one position-dependent measurement signal from the signal beam. At least one switching element 40 for defining a predetermined scanning point is arranged in a signal path downstream of superimposition location and upstream of a signal digitizing device.