| 摘要 |
PROBLEM TO BE SOLVED: To provide technology for controlling extraction modes of ions extracted from a plasma chamber.SOLUTION: In a microwave ion source 10, a plasma chamber 11 includes an inlet end 13 where a microwave introduction window 16 is provided, an outlet end 14 having an ion extraction opening 17, and a side wall 15 for connecting the inlet end 13 to the outlet end 14. A regulation member partitions a plasma generating space 12 in communication with the ion extraction opening 17 by regulating the volume of the plasma chamber. The plasma chamber 11 is formed so that one or more regulation members selected from a plurality of the regulation members prepared in accordance with the extraction modes of ions to be extracted from the ion extraction opening 17 can be mounted in the plasma chamber, and formed so that the volume of the plasma generating space 12 can be differentiated in accordance with the mounted regulation members. |
