| 摘要 |
PROBLEM TO BE SOLVED: To improve the scratch resistance of a coating.SOLUTION: An anti-reflection coating (2) has alternating layers of layers having a first refractive index and of layers having a second, higher refractive index. The layers having the higher refractive index contain nitride or oxynitride of silicon and of at least one other element and the layers having the first refractive index contain oxide of silicon and of at least one other element. The molar fraction of silicon in the layers having the first refractive index is predominant when compared with the molar fraction(s) of the other element or elements. The uppermost layer (27) of the anti-reflection coating (2) is a layer having the first refractive index. A layer of chain-form organofluoro molecules is disposed on the anti-reflection coating (2), wherein the molecules are bonded at their ends to the surface of the optical element, particularly to the uppermost layer (27) of the anti-reflection coating (2). |
