发明名称 METHOD FOR MANUFACTURING SOLAR BATTERY
摘要 PROBLEM TO BE SOLVED: To provide a method for manufacturing a solar battery, by which a solar battery low in reflectance and high in conversion efficiency can be manufactured with a reduced number of steps.SOLUTION: A method for manufacturing a solar battery having a semiconductor silicon substrate and a texture structure formed in a surface of the silicon substrate comprises the steps of: slicing a silicon ingot, thereby preparing a slice wafer having, on its surface, a damaged layer resulting from the slicing; immersing the slice wafer in a heated alkali aqueous solution, and performing a first etching process on the slice wafer, thereby removing the damaged layer; lowering the temperature of the alkali aqueous solution; and performing a second etching process on the slice wafer with the damaged layer removed therefrom at a temperature lower than the temperature of the alkali aqueous solution in the first etching process, thereby forming the texture structure.
申请公布号 JP2015228416(A) 申请公布日期 2015.12.17
申请号 JP20140113419 申请日期 2014.05.30
申请人 SHIN ETSU CHEM CO LTD 发明人 TSUKIGATA SHINTARO;OTSUKA HIROYUKI
分类号 H01L31/0236;H01L21/308;H01L31/18 主分类号 H01L31/0236
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