| 摘要 |
In the present invention, when one direction of the plane directions of a substrate (10) is a first direction and the direction perpendicular to the first direction of the plane directions of the substrate (10) is a second direction, an oscillating body (12) is supported at an outer peripheral section (13) via a plurality of beam sections (16-19) therebetween having a first beam-configuring member (16a-19a) that can displace in at least the first direction, and a second beam-configuring member (16b-19b) that is joined to the first beam-configuring member (16a-19a) and that can displace in at least the second direction. Also, at least at a subset of the plurality of the beam sections (16-19), the beam configuring members (16b-19b) at the outer peripheral section (13) side among the first beam-configuring members and second beam-configuring members (16a-19b) are integrated with each other. |
