| 发明名称 |
化学的および／または電気化学的な処理のための装置内でプレート状の基板を搬送するための装置 |
| 摘要 |
<p>The invention relates to a device for transporting plate-shaped substrates (10) in a system (8) for chemical and/or electrochemical treatment, in particular for currentless separation of conductive layers. The device according to the invention comprises at least one rotating transport element (14), which at least partially comprises mineral glass. The invention further relates to a conveyance device having a plurality of rotating transport elements (14), each arranged over each other in pairs, between which the plate-shaped substrates (10) can be moved.</p> |
| 申请公布号 |
JP5832449(B2) |
申请公布日期 |
2015.12.16 |
| 申请号 |
JP20120550405 |
申请日期 |
2011.01.24 |
| 申请人 |
アトテツク・ドイチユラント・ゲゼルシヤフト・ミツト・ベシユレンクテル・ハフツングＡｔｏｔｅｃｈ Ｄｅｕｔｓｃｈｌａｎｄ ＧｍｂＨ |
发明人 |
ミヒャエル クライチィ;ヘンリー クンツェ;アーミン ルッチュ |
| 分类号 |
C23C18/31;C25D17/06;H01L21/677 |
主分类号 |
C23C18/31 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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