发明名称 |
Manufacturing method of optical waveguide device |
摘要 |
<p>To provide a manufacturing method of an optical waveguide device which is capable of suppressing the surface roughening of core side surfaces of an optical waveguide when the optical waveguide is formed on a surface of a metal substrate. An under cladding layer 2 containing an irradiation light absorbing agent is formed on a surface of a metal substrate 1 which is a roughened surface. Alternatively, an irradiation light absorbing layer is formed prior to the formation of the under cladding layer free from the irradiation light absorbing agent. In a subsequent step of forming cores 3, irradiation light directed onto a photosensitive resin layer for the formation of the cores 3 and transmitted through the photosensitive resin layer is absorbed or attenuated in the under cladding layer 2 containing the above-mentioned irradiation light absorbing agent or in the irradiation light absorbing layer.
</p> |
申请公布号 |
EP2124079(A3) |
申请公布日期 |
2010.02.24 |
申请号 |
EP20090159912 |
申请日期 |
2009.05.11 |
申请人 |
NITTO DENKO CORPORATION |
发明人 |
HODONO, MASAYUKI;SHIMIZU, YUSUKE;FUJISAWA, JUNICHI |
分类号 |
G02B6/138 |
主分类号 |
G02B6/138 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|