| 摘要 |
<p>A plasma is created at atmospheric pressure (17) in at least one hollow dielectric tube (16); the gases to be treated circulate in the dielectric tube in contact with the plasma to dissociate the molecules constituting the gas and form reactive components, in particular fluorided, and destroying the reactive components by reacting them with a corresponding reactive element An Independent claim is also included for an installation for carrying out the process, with at least one high frequency surface wave exciter (10) associated with a wave guide (18) which channels the waves towards a hollow dielectric tube (16) fed with a vector gas to create a plasma. The reaction stage is carried out in a treatment unit (12). Each surface wave exciter is equipped with a cylindrical sleeve (20) of conductive material inside which the corresponding dielectric tube is mounted and containing a zone of concentration of the incident waves in a space between the internal walls of the exciter and a free end of the sleeve to create a coaxial electrical field in the tube. A cooling liquid circulates between an inner and an outer cylinder which are part of the sleeve, or between the sleeve and the dielectric tube. Two coaxial dielectric tubes have the vector gas supplied in the cylindrical space between the tubes and the gases to be treated inside the inner tube. The dielectric tube is made of a material resistant to fluorided chemicals, in particular a ceramic such as alumina. At least two high frequency wave exciters are placed in series, with at least two treatment units for the reactive gases each placed at the exit from the corresponding exciter, and at least one dehydration unit is placed between the two exciters.</p> |
