| 摘要 |
<p>PROBLEM TO BE SOLVED: To make the frequency in use of an aligner used for the manufacture of a liquid crystal display device and a semiconductor device high and to restrain the increase of equipment by easily selecting mixed wavelength and single wavelength. SOLUTION: This aligner includes a light source 2 emitting light having the mixed wavelength, a filter 6 absorbing the 1st wavelength of the light emitted from the light source 2, the mask for exposure 7B having film or a base plate consisting of material transmitting the light transmitted through the filter 6 and absorbing the light having 2nd wavelength, a projection lens 8 transmitting the light transmitted through the mask 7B and a base plate stage 1 arranged in the light advancing direction of the lens 8.</p> |
