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发明名称
VAPOR PHASE GROWTH DEVICE
摘要
申请公布号
JPS6131393(A)
申请公布日期
1986.02.13
申请号
JP19840154352
申请日期
1984.07.25
申请人
MATSUSHITA ELECTRIC IND CO LTD
发明人
BAN YUZABURO;MORIZAKI MOTOJI;OGURA MOTOTSUGU;HASE NOBUYASU
分类号
C30B25/02;C30B25/14;H01L21/205
主分类号
C30B25/02
代理机构
代理人
主权项
地址
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