METHOD AND APPARATUS FOR BAKING SUBSTRATES USED IN MANUFACTURING FLAT PANEL DISPLAY

摘要

PURPOSE: A bake apparatus and a method used for manufacturing a flat display capable of quickly cooling a substrate are provided to maximize the cooling efficiency of the substrate. CONSTITUTION: A pre-heating unit rapidly heats a substrate. A main heating unit is connected to the pre-heating unit. The main heating unit heats the substrate heated from the pre-heating unit. A pre-cooling unit(400) is connected to the main heating unit. The pre cooling unit rapidly cools the substrate heated in the main heating unit. A main cooling unit(500) is connected to the pre cooling unit. The main cooling unit cools the substrate frozen in the free cooling unit.