| 摘要 |
PROBLEM TO BE SOLVED: To provide a semiconductor wafer inspecting device for determining whether required operation is executed or not by identifying an operator at the time when operation is performed. SOLUTION: At the time when specified operation of a device whose operator is authenticated is performed, the operator is identified in addition. Operation to be performed by another operator than the previously authenticated operator is executed if permitted. The history of this operation and the history of a change of data in the device are recorded and displayed. Thus, the operator can be authenticated only when required, to prevent unauthorized access to information in the device without lowering operability. COPYRIGHT: (C)2009,JPO&INPIT
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